LineWorks SPACE Chart Plug-Ins

Expand the statistical analyses options

The SPACE Charts of LineWorks SPACE are extendable with a series of task related plug-ins, directly at the graphical interface to the users. The SPACE Chart Plug-Ins offer advanced analyses features to your engineers and operators on the spot. Get more out of the data pool that you already have in SPACE! With these plug-ins, you put your workforce in the position to respond quickly. Your team is properly informed and will induce the right measures.

Integration

Extra Plots

These extra graphs are integrated right into the SPACE chart window and provide deeper insight directly at the place where needed.

SPACE Matching

You can use the SPACE matching capabilities as usual and get extended views onto your data with a depth down to the raw value level.

Discover

You see at a glance irregularities, identify assignable causes quickly, and learn more details about your processes, tools, and products.

SPACECharts

The Plug-Ins in detail:

SPACE DMP

LineWorks SPACE DMP

Device Maps

  • View parameters that exist continuously across a device surface
  • Overlay multiple devices (mean, std dev, min, max, range)
  • Identify repeating patterns at a glance
  • Compare unit to unit, lot to lot,…
SPACE EWM

LineWorks SPACE EWM

Etest Wafer Maps

  • Visualize electrical test data on wafer surfaces
  • Discover patterns on wafer surfaces
  • Overlay multiple wafers (mean, std dev, min, max, range)
  • Detect probe card issues
SPACE PPP

LineWorks SPACE PPP

Probability Plot

  • Compare distributions of parameters from different tools, products,…
  • Visualize outliers and accumulations
  • Detect low measurement resolution
  • Find out causes for apparent offsets
  • Display spec and control limits
SPACE RLC

LineWorks SPACE RLC

Raw Line Chart

  • Visual sample to sample comparison
  • Detect conspicuous patterns and deviation within a sample
  • Identify abnormal profiles quickly
  • View measurement sites on a straight line (if no 2D interpolation possible)
SPACE TGP

LineWorks SPACE TGP

Trend Grouping

  • Variability charts as box plots to compare groups and nested subgroups
  • Explore batch to batch, lot to lot, tool to tool etc. variations at a glance
  • Discover abnormal trends in shift, day, week, or month cycles

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