Microfabrication Process Engineering

• Understanding its foundation and applying XperiDesk development methodology
• Predicting the effect of a given process step (and its variability) on overall yield and manufacturability
• Evaluating how a new mask design might affect the outcome of a previously developed process
• Synthesizing aspects of device design and process engineering
• Learning and understanding how XperiDesk can be used for Tracking & Tracing

Course outline: 

1. XperiDesk methodology background for collaborative engineering
2. Designing / Amending a manufacturing flow
3. Virtually verifying new / amended process flows
4. Tracking & Tracing
   

Overview

Course Content

XperiDesk Methodology Background for Collaborative Engineering

• Getting a glimpse of the XperiDesk methodology foundation
• Understanding the XperiDesk process engineering methodology
  
  

Designing / Amending a Manufacturing Flow

• Learning to create new materials and process steps
• Using abstract process flow design to create manufacturing flows from scratch
• Identifying key considerations of selecting specialized process steps to specify an abstract process flow (e.g., pre-existing topography)
• Learning to iteratively evolve existing process flows
  
  

Virtually Verifying New / Amended Process Flows

• Using DoEs to understand and verify process behavior
• Determining manufacturability using XperiDesk to increase the fab readiness of a process flow
• Understanding the utility of simulators to visually communicate design intent (e.g., SoftMEMS) and to predict process success
  
  

Tracking & Tracing

• Performing manual / electronic tracking & tracing of experiments
• Understanding why and how to systematically and comprehensively collect experiment information
• Setting up automatic collection and arranging of data into information
• Retrieving & analyzing data and information
  
  

Objective

Target Groups & Requirements

Training Methods

By the end of this course, participants will:

• Understand and apply the foundational principles of XperiDesk’s development methodology.
• Learn to predict the impact of process steps and variability on yield and manufacturability.
• Evaluate how changes, such as new mask designs, affect previously developed processes.
• Synthesize key aspects of device design with process engineering for more effective outcomes.
• Gain proficiency in using XperiDesk for Tracking & Tracing to systematically manage and analyze experimental data.
  
  

This course is designed for laboratory workers, engineers, and scientists who want to deepen their understanding of the methodologies and capabilities of the XperiDesk system for collaborative, digital process engineering.

Requirements:

• Familiarity with XperiDesk basics, including completion of all XperiDesk Basics How-to Videos.
• Practical experience with basic XperiDesk tasks, such as:
  • Navigating and operating the GUI.
  • Locating, opening, locking, and saving items.
• Access to the CMC XperiDesk Training System during the course.
• Use of two displays for optimal course participation.
  
  

• The course includes lectures, simulations of specific scenarios, discussions of real-world application examples, and hands-on exercises.
• Simulations and practical exercises can be completed independently on a laptop, providing participants with a flexible and interactive learning experience
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