iCADA Suite

Comprehensive Solutions for Advanced Durables, Reticle, and Probe Cards Management

The iCADA Suite offers advanced solutions for managing durables, reticles, and probe cards across all lifecycle stages. From usage to storage, inspection, and maintenance, it helps optimize material utilization, reduce risks, and ensure production quality. With real-time tracking, streamlined workflows, and centralized access, iCADA Suite enhances efficiency and extends the lifetime of critical assets in semiconductor manufacturing.

Reticle Management in Semiconductor Manufacturing

Reticles are essential photomasks used in photolithography to transfer circuit patterns onto silicon wafers. Given their critical role and high cost, effective reticle management is key to maintaining production quality and yield in semiconductor fabs.

Key challenges in reticle management:

Preventing contamination, defects, and damage during handling and storage.
Managing reticle wear from repeated use through regular inspection and cleaning.
Ensuring correct reticle usage and tracking to avoid production errors.
Reducing costs through efficient reticle tracking and maintenance.

End-to-End Traceability

Automated Inspection and Analysis

Smart Maintenance Planning

Mask Vendor Connectivity (MaVen)

Seamless Integration

Configurable Workflows and Business Rules

Cost Control through Optimized Reticle Utilization

Reticle Lifecycle Management

Extensive management of reticle life cycles to ensure haze control and crystal growth prevention.

Reticle Inspection Management

Centralized system for reviewing and analyzing reticle inspection results from multiple tools and sources. Add-on of Reticle Lifecycle Management (RTCL).

Probe Card Management

Centralized solution for managing probe cards and assemblies, supporting efficient maintenance and operation.

Durables Management

Complete lifecycle management for all durables, ensuring optimal usage and maintenance.

Inspection, Repair, and Storage Management

Ensure efficient reticle inspection, repair, and storage utilization, with full lifecycle traceability and maintenance control, supported by the machine management solution (LineWorks MMS).

Analytics and Reporting

Gain actionable insights and real-time dashboards through the advanced monitoring and reporting tool (LineWorks FACE), enabling data-driven decisions in reticle management.

Supplier Quality and Collaboration

Coordinate with mask shops and ensure incoming reticle quality through automated validation and communication, powered by the supplier quality management solution (LineWorks SQM).

Carrier and Reticle Pod Management

Optimize the handling and tracking of reticle pods and carriers with the carrier management solution (LineWorks CarMa), ensuring secure transport and storage.

Recipe and Resource Management

Manage recipes, production resources, and maintain equipment setup according to recipes to ensure proper reticle usage and integration with lithography tools, enabled by the advanced recipe management solution (LineWorks RM).

Material Flow Automation

Control material flows and track how reticles are transported — know where they come from and where they are going, ensuring real-time coordination on the shop floor with the next generation material control system (RACE MCS™), supporting seamless reticle dispatch and delivery.

Ready to Improve Reticle and Durables Management in Semiconductor Manufacturing?

Discover how advanced reticle, probe card, and durables management can improve efficiency and reduce risks in semiconductor manufacturing. Reach out to us to explore how iCADA Suite fits your production environment and business needs.

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Optimizing Semiconductor Frontend and Backend Processes for Greater Efficiency and Yield

Semiconductor manufacturing is a multi-stage process, from wafer fabrication and photolithography to packaging and final testing. Each stage presents unique challenges that require precise process control, automation, and data-driven decision-making to ensure high yield and efficiency.

Comprehensive Solutions for Advanced Durables, Reticle, and Probe Cards Management

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Reticle Management in Semiconductor Manufacturing

Key challenges in reticle management:

Preventing contamination, defects, and damage during handling and storage.

Managing reticle wear from repeated use through regular inspection and cleaning.

Ensuring correct reticle usage and tracking to avoid production errors.

Reducing costs through efficient reticle tracking and maintenance.

Features Highlight

Modular Solutions for Intelligent Control, Analysis, and Durables Management